How did you clean it? Full force blast, directly on the element? I've heard that some say they're so sensitive, that they only use the dip-to-clean method. I usually spray lightly, with the spray nozzle a good distance from the sensor.
Originally Posted By: wallyuwl
This happens when you clean MAF sensors. The computer will recalibrate to the cleaned sensor and it will be fine in a few days.
I've not seen any change in fuel trims in my Subie after a few cleanings. I can't imagine the OP's MAF was dirty enough to effect them at all let alone enough to effect driveability.
That car keeps the crankcase under strong vacuum. Did you by any chance take off the oil fill cap and not get it back on right? Or did any vacuum line get pulled off during the AF change? The symptoms hopefully point to a vacuum leak and not a bad MAF. Did the CEL come on yet?
I've had the idle change for a day or so, then go back to normal, after cleaning the MAF on the Vibe and the Equinox (first cleaned it on the Nox at only 24k miles).
You could well have damaged it especially if it is a thin film sensor the protective layer could have been scratched off or melted off by using a harsh solvent!